Invention Grant
- Patent Title: Method and apparatus for layout pattern selection
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Application No.: US17422520Application Date: 2020-01-10
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Publication No.: US11755814B2Publication Date: 2023-09-12
- Inventor: Wei-jie Chen
- Applicant: ASML NETHERLANDS B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML NETHERLANDS B.V.
- Current Assignee: ASML NETHERLANDS B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Pillsbury Winthrop Shaw Pittman, LLP
- Priority: WO TCN2019073714 2019.01.29
- International Application: PCT/EP2020/050494 2020.01.10
- International Announcement: WO2020/156777A 2020.08.06
- Date entered country: 2021-07-13
- Main IPC: G06F30/30
- IPC: G06F30/30 ; G06F30/27 ; G03F7/00 ; G06N3/08 ; G06F30/398 ; G03F1/36

Abstract:
A method for determining a training pattern in a layout patterning process. The method includes generating a plurality of features from patterns in a pattern set; grouping the patterns in the pattern set into individual groups based on similarities in the plurality of generated features; and selecting representative patterns from the individual groups to determine the training pattern. In some embodiments, the method is a method for training a machine learning model in a layout patterning process. The method may include, for example, providing representative patterns from the individual groups to the machine learning model to train the machine learning model to predict a continuous transmission mask (CTM) map for optical proximity correction (OPC) in the layout patterning process.
Public/Granted literature
- US20220100935A1 METHOD AND APPARATUS FOR LAYOUT PATTERN SELECTION Public/Granted day:2022-03-31
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