Invention Grant
- Patent Title: Scanning electron microscope
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Application No.: US17616253Application Date: 2019-06-06
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Publication No.: US11756763B2Publication Date: 2023-09-12
- Inventor: Teruo Kohashi , Hideo Morishita , Junichi Katane
- Applicant: Hitachi High-Tech Corporation
- Applicant Address: JP Tokyo
- Assignee: HITACHI HIGH-TECH CORPORATION
- Current Assignee: HITACHI HIGH-TECH CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: MILES & STOCKBRIDGE, P.C.
- International Application: PCT/JP2019/022452 2019.06.06
- International Announcement: WO2020/245962A 2020.12.10
- Date entered country: 2021-12-03
- Main IPC: H01J37/244
- IPC: H01J37/244 ; G01N23/2251 ; H01J37/28

Abstract:
A scanning electron microscope includes a spin detector configured to measure secondary electron spin polarization of secondary electrons emitted from the sample, and an analysis device configured to analyze secondary electron spin polarization data measured by the spin detector. The analysis device evaluates the strain in the sample by calculating a difference in the secondary electron spin polarization data of adjacent pixels.
Public/Granted literature
- US20220246393A1 SCANNING ELECTRON MICROSCOPE Public/Granted day:2022-08-04
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