- Patent Title: Station and method for measuring airborne molecular contamination
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Application No.: US17057953Application Date: 2019-05-21
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Publication No.: US11768134B2Publication Date: 2023-09-26
- Inventor: Julien Bounouar , Olivier Le Barillec
- Applicant: PFEIFFER VACUUM
- Applicant Address: FR Annecy
- Assignee: PFEIFFER VACUUM
- Current Assignee: PFEIFFER VACUUM
- Current Assignee Address: FR Annecy
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: FR 00562 2018.05.28
- International Application: PCT/EP2019/063027 2019.05.21
- International Announcement: WO2019/228844A 2019.12.05
- Date entered country: 2020-11-23
- Main IPC: G01N1/26
- IPC: G01N1/26 ; G01N33/00

Abstract:
A station for measuring airborne molecular contamination includes: at least one gas analyser; a conditioning pump; and a sequencing unit including a sequencing program defining an order for the measurements to be performed for at least two sampling lines, the sequencing unit being configured to control the connection of a sampling line to be measured, the measurement of which is programmed to follow that of a sampling line being measured, with the conditioning pump, while controlling the connection of the sampling line being measured with the at least one gas analyser. A method for measuring airborne molecular contamination using such a station is also disclosed.
Public/Granted literature
- US20210190647A1 STATION AND METHOD FOR MEASURING AIRBORNE MOLECULAR CONTAMINATION Public/Granted day:2021-06-24
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