Invention Grant
- Patent Title: Accelerometer having an over travel stop with a stop gap less than a minimum etch size
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Application No.: US17470073Application Date: 2021-09-09
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Publication No.: US11768220B2Publication Date: 2023-09-26
- Inventor: Aaron A. Geisberger , Jun Tang
- Applicant: NXP USA, Inc.
- Applicant Address: US TX Austin
- Assignee: NXP USA, Inc.
- Current Assignee: NXP USA, Inc.
- Current Assignee Address: US TX Austin
- Main IPC: G01P15/125
- IPC: G01P15/125 ; G01P15/08

Abstract:
A microelectromechanical systems (MEMS) accelerometer comprises a compliant spring structure with a first beam, a second beam, and a rigid structure. One end of the first beam and one end of the second beam are coupled to the rigid structure and a proof mass is coupled to another end of the second beam. Further, a spring anchor is coupled to another end of the first beam. In response to the proof mass moving, an extension coupled to the rigid structure moves in an opposite direction to motion of the proof mass to contact the proof mass and stop the movement of the proof mass.
Public/Granted literature
- US20230074541A1 ACCELEROMETER HAVING AN OVER TRAVEL STOP WITH A STOP GAP LESS THAN A MINIMUM ETCH SIZE Public/Granted day:2023-03-09
Information query
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