公开(公告)号：US20210088545A1

公开(公告)日：2021-03-25

申请号：US16575847

申请日：2019-09-19

Applicant: NXP USA, Inc.

Inventor： Jun Tang

IPC: G01P1/00

Abstract: An inertial sensor includes a movable mass spaced apart from a surface of the substrate. The movable mass is adapted for motion about a rotational axis positioned between first and second ends of the movable mass in response to a first force imposed upon the movable mass in a first direction that is perpendicular to the surface of the substrate. The inertial sensor further includes a damping system configured to limit motion of the movable mass in a second direction perpendicular to the first direction. The damping system includes a first damping structure coupled to the movable mass, a second damping structure adjacent to the first damping structure, the first and second damping structures being spaced apart from the surface of the substrate, and a spring structure interconnected between the movable mass and the second damping structure.

公开(公告)号：US20250026629A1

公开(公告)日：2025-01-23

申请号：US18222926

申请日：2023-07-17

Applicant: NXP USA, Inc.

Inventor： Jun Tang ,  Aaron A. Geisberger

IPC: B81B3/00 ,  B81C1/00

Abstract: A MEMS inertial sensor device, method of operation, and fabrication process are described wherein a MEMS inertial sensor and drive actuation units are coupled together in operational engagement, where the MEMS inertial sensor includes a substrate and a proof mass array positioned in spaced apart relationship above a surface of the substrate and constructed with a plurality of proof mass sub-structures which are each separately connected to the substrate with orthogonally disposed pairs of spring suspension structures and which are each rigidly connected to one or more adjacent proof mass sub-structures with one or more connector bars so that the plurality of proof mass sub-structures move as a single proof mass array that can operate at resonant frequencies of at least 100 kHz when oscillating in first and second orthogonal directions.

公开(公告)号：US20240329076A1

公开(公告)日：2024-10-03

申请号：US18295232

申请日：2023-04-03

Applicant: NXP USA, Inc.

Inventor： Jun Tang ,  Jinglun Li ,  Andrew C. McNeil ,  Aaron A. Geisberger

IPC: G01P15/08 ,  B81C1/00

CPC classification number: G01P15/08 ,  B81C1/00198 ,  G01P2015/0837

Abstract: A MEMS device includes a substrate, a set of spring, and a proof mass suspended above and coupled to the substrate by the springs. Each spring includes a corresponding anchor on the substrate and a beam extending away from that anchor. Each beam has a fixed end that is coupled to the anchor by a first linkage at one end of the beam proximal to the anchor and a free end that is coupled to the proof mass by a second linkage at an end of the beam that is distal to the anchor. The anchors are arranged symmetrically around a center of the proof mass. The proof mass translates vertically with respect to the substrate and when a vertical displacement of the proof mass toward the substrate reaches a predefined value, the free end of each spring contacts the substrate and prevents the proof mass from contacting the substrate.

公开(公告)号：US12105114B2

公开(公告)日：2024-10-01

申请号：US18311302

申请日：2023-05-03

Applicant: NXP USA, Inc.

Inventor： Aaron A. Geisberger ,  Jun Tang

IPC: G01P15/125 ,  G01P15/08

CPC classification number: G01P15/125 ,  G01P2015/0871

Abstract: A microelectromechanical systems (MEMS) accelerometer comprises a compliant spring structure with a first beam, a second beam, and a rigid structure. One end of the first beam and one end of the second beam are coupled to the rigid structure and a proof mass is coupled to another end of the second beam. Further, a spring anchor is coupled to another end of the first beam. In response to the proof mass moving, an extension coupled to the rigid structure moves in an opposite direction to motion of the proof mass to contact the proof mass and stop the movement of the proof mass.

公开(公告)号：US11105826B2

公开(公告)日：2021-08-31

申请号：US16575847

申请日：2019-09-19

Applicant: NXP USA, Inc.

Inventor： Jun Tang

IPC: G01P15/08 ,  G01P1/00 ,  G01P15/125

Abstract: An inertial sensor includes a movable mass spaced apart from a surface of the substrate. The movable mass is adapted for motion about a rotational axis positioned between first and second ends of the movable mass in response to a first force imposed upon the movable mass in a first direction that is perpendicular to the surface of the substrate. The inertial sensor further includes a damping system configured to limit motion of the movable mass in a second direction perpendicular to the first direction. The damping system includes a first damping structure coupled to the movable mass, a second damping structure adjacent to the first damping structure, the first and second damping structures being spaced apart from the surface of the substrate, and a spring structure interconnected between the movable mass and the second damping structure.

公开(公告)号：US20210123946A1

公开(公告)日：2021-04-29

申请号：US17027948

申请日：2020-09-22

Applicant: NXP USA, Inc.

Inventor： Andrew C McNeil ,  Jerome Romain Enjalbert ,  Joel Cameron Beckwith ,  Jun Tang

IPC: G01P15/125 ,  B81B3/00

Abstract: A sensor system includes a transducer for sensing a physical stimulus along at least two orthogonal axes and an excitation circuit. The transducer includes a movable mass configured to react to the physical stimulus and multiple differential electrode pairs of electrodes. Each of the electrode pairs is configured to detect displacement of the movable mass along one of the orthogonal axes. The excitation circuit is connectable to the electrodes in various electrode connection configurations, with different polarity schemes, that enable excitation and sampling of each of the orthogonal axes during every sensing period. For each sensing period, a composite output signal is produced that includes the combined information sensed along each of the orthogonal axes. The individual sense signals for each orthogonal axis may be extracted from the composite output signals.

公开(公告)号：US20180275161A1

公开(公告)日：2018-09-27

申请号：US15469754

申请日：2017-03-27

Applicant: NXP USA, INC.

Inventor： Jun Tang

IPC: G01P15/125 ,  G01P15/18

CPC classification number: G01P15/125 ,  G01P15/18 ,  G01P2015/0805 ,  G01P2015/082 ,  G01P2015/0837

Abstract: An inertial sensor includes a proof mass spaced apart from a surface of a substrate. The proof mass has a first section and a second section, where the first section has a first mass that is greater than a second mass of the second section. An anchor is coupled to the surface of the substrate and a spring system is interconnected between the anchor and the first and second sections of the proof mass. The spring system enables translational motion of the first and second sections of the proof mass in response to linear acceleration forces imposed on the inertial sensor in any of three orthogonal directions.

公开(公告)号：US20230266358A1

公开(公告)日：2023-08-24

申请号：US18311302

申请日：2023-05-03

Applicant: NXP USA, Inc.

Inventor： Aaron A. Geisberger ,  Jun Tang

IPC: G01P15/125

CPC classification number: G01P15/125 ,  G01P2015/0871

Abstract: A microelectromechanical systems (MEMS) accelerometer comprises a compliant spring structure with a first beam, a second beam, and a rigid structure. One end of the first beam and one end of the second beam are coupled to the rigid structure and a proof mass is coupled to another end of the second beam. Further, a spring anchor is coupled to another end of the first beam. In response to the proof mass moving, an extension coupled to the rigid structure moves in an opposite direction to motion of the proof mass to contact the proof mass and stop the movement of the proof mass.

公开(公告)号：US11726107B2

公开(公告)日：2023-08-15

申请号：US17027948

申请日：2020-09-22

Applicant: NXP USA, Inc.

Inventor： Andrew C McNeil ,  Jerome Romain Enjalbert ,  Joel Cameron Beckwith ,  Jun Tang

IPC: G01P15/125 ,  B81B3/00

CPC classification number: G01P15/125 ,  B81B3/0027 ,  B81B2201/0228

Abstract: A sensor system includes a transducer for sensing a physical stimulus along at least two orthogonal axes and an excitation circuit. The transducer includes a movable mass configured to react to the physical stimulus and multiple differential electrode pairs of electrodes. Each of the electrode pairs is configured to detect displacement of the movable mass along one of the orthogonal axes. The excitation circuit is connectable to the electrodes in various electrode connection configurations, with different polarity schemes, that enable excitation and sampling of each of the orthogonal axes during every sensing period. For each sensing period, a composite output signal is produced that includes the combined information sensed along each of the orthogonal axes. The individual sense signals for each orthogonal axis may be extracted from the composite output signals.

公开(公告)号：US10429407B2

公开(公告)日：2019-10-01

申请号：US15469754

申请日：2017-03-27

Applicant: NXP USA, INC.

Inventor： Jun Tang

IPC: G01P15/12 ,  G01P15/125 ,  G01P15/18 ,  G01P15/08

Abstract: An inertial sensor includes a proof mass spaced apart from a surface of a substrate. The proof mass has a first section and a second section, where the first section has a first mass that is greater than a second mass of the second section. An anchor is coupled to the surface of the substrate and a spring system is interconnected between the anchor and the first and second sections of the proof mass. The spring system enables translational motion of the first and second sections of the proof mass in response to linear acceleration forces imposed on the inertial sensor in any of three orthogonal directions.