Invention Grant
- Patent Title: Micromechanical sensor
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Application No.: US17447764Application Date: 2021-09-15
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Publication No.: US11768221B2Publication Date: 2023-09-26
- Inventor: Andrea Visconti , Artjom Kosov , Jochen Hahn , Johannes Classen , Timo Giesselmann
- Applicant: Robert Bosch GmbH
- Applicant Address: DE Stuttgart
- Assignee: ROBERT BOSCH GMBH
- Current Assignee: ROBERT BOSCH GMBH
- Current Assignee Address: DE Stuttgart
- Agency: NORTON ROSE FULBRIGHT US LLP
- Agent Gerard Messina
- Priority: DE 2020211741.1 2020.09.21
- Main IPC: B81B7/02
- IPC: B81B7/02 ; G01P15/18

Abstract:
A micromechanical sensor, including a micromechanical chip having a first micromechanical structure, a first evaluation chip, having a first application-specific integrated circuit, and a second evaluation chip having a second application-specific integrated circuit. The first evaluation chip and the micromechanical chip are situated in a stacked manner, the micromechanical chip being directly electrically conductively connected with the first evaluation chip and the first evaluation chip being directly electrically conductively connected with the second evaluation chip. The first application-specific integrated circuit primarily includes analog circuit elements and the second application-specific circuit primarily includes digital circuit elements.
Public/Granted literature
- US20220091157A1 MICROMECHANICAL SENSOR Public/Granted day:2022-03-24
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