Invention Grant
- Patent Title: Training methods for machine learning assisted optical proximity error correction
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Application No.: US18089007Application Date: 2022-12-27
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Publication No.: US11768440B2Publication Date: 2023-09-26
- Inventor: Jing Su , Yen-Wen Lu , Ya Luo
- Applicant: ASML NETHERLANDS B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML NETHERLANDS B.V.
- Current Assignee: ASML NETHERLANDS B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Pillsbury Winthrop Shaw Pittman, LLP
- Main IPC: G03F7/20
- IPC: G03F7/20 ; G03F7/00 ; G06N20/00 ; G06N5/047
Abstract:
A method including: obtaining data based an optical proximity correction for a spatially shifted version of a training design pattern; and training a machine learning model configured to predict optical proximity corrections for design patterns using data regarding the training design pattern and the data based on the optical proximity correction for the spatially shifted version of the training design pattern.
Public/Granted literature
- US20230137097A1 TRAINING METHODS FOR MACHINE LEARNING ASSISTED OPTICAL PROXIMITY ERROR CORRECTION Public/Granted day:2023-05-04
Information query
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