Invention Grant
- Patent Title: Ferroelectric assemblies and methods of forming ferroelectric assemblies
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Application No.: US17973204Application Date: 2022-10-25
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Publication No.: US11769816B2Publication Date: 2023-09-26
- Inventor: Albert Liao , Manzar Siddik
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Wells St. John P.S.
- The original application number of the division: US17169324 2021.02.05
- Main IPC: G11C11/22
- IPC: G11C11/22 ; H01L29/51 ; H01L29/40 ; H01L21/28 ; H01L49/02 ; H10B53/00 ; H10B53/30

Abstract:
Some embodiments include ferroelectric assemblies. Some embodiments include a capacitor which has ferroelectric insulative material between a first electrode and a second electrode. The capacitor also has a metal oxide between the second electrode and the ferroelectric insulative material. The metal oxide has a thickness of less than or equal to about 30 Å. Some embodiments include a method of forming an assembly. A first capacitor electrode is formed over a semiconductor-containing base. Ferroelectric insulative material is formed over the first electrode. A metal-containing material is formed over the ferroelectric insulative material. The metal-containing material is oxidized to form a metal oxide from the metal-containing material. A second electrode is formed over the metal oxide.
Public/Granted literature
- US20230045210A1 Ferroelectric Assemblies and Methods of Forming Ferroelectric Assemblies Public/Granted day:2023-02-09
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