Invention Grant
- Patent Title: Laser-sustained plasma light source with reverse vortex flow
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Application No.: US17696653Application Date: 2022-03-16
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Publication No.: US11776804B2Publication Date: 2023-10-03
- Inventor: Ilya Bezel , Leonid Borisovich Zvedenuk , Andrey Evgenievich Stepanov , Vitaly K. Rerikh , Boris Vasilyevich Potapkin
- Applicant: KLA Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA Corporation
- Current Assignee: KLA Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Suiter Swantz pc llo
- Main IPC: H01J61/52
- IPC: H01J61/52 ; H01J65/04 ; H05H1/46

Abstract:
A laser-sustained plasma (LSP) light source with reverse vortex flow is disclosed. The LSP source includes gas cell including a gas containment structure including a body, neck, and shaft. The gas cell includes one or more gas delivery lines for delivery gas to one or more nozzles positioned in or below the neck of the gas containment structure. The gas cell includes one or more gas inlets and one or more gas outlets arranged to generate a reverse vortex flow within the gas containment structure of the gas cell. The LSP source also includes a laser pump source configured to generate an optical pump to sustain a plasma in a region of the gas containment structure. The LSP source includes a light collector element configured to collect at least a portion of broadband light emitted from the plasma.
Public/Granted literature
- US20220344146A1 LASER-SUSTAINED PLASMA LIGHT SOURCE WITH REVERSE VORTEX FLOW Public/Granted day:2022-10-27
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