Invention Grant
- Patent Title: Resistive random access memory and manufacturing method thereof
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Application No.: US17100342Application Date: 2020-11-20
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Publication No.: US11778932B2Publication Date: 2023-10-03
- Inventor: Cheng-Hong Wei , Chien-Hsiang Yu , Hung-Sheng Chen
- Applicant: Winbond Electronics Corp.
- Applicant Address: TW Taichung
- Assignee: WINBOND ELECTRONICS CORP.
- Current Assignee: WINBOND ELECTRONICS CORP.
- Current Assignee Address: TW Taichung
- Agency: Muncy, Geissler, Olds & Lowe, P.C.
- Priority: TW 8142465 2019.11.22
- Main IPC: H01L45/00
- IPC: H01L45/00 ; H10N70/00 ; H10B63/00

Abstract:
A RRAM and its manufacturing method are provided. The RRAM includes a first dielectric layer formed on a substrate, and two memory cells. The two memory cells include two bottom electrode structures separated from each other. Each bottom electrode structure fills one of two trenches in the first dielectric layer. The two memory cells also include a resistance switching layer and a top electrode structure. The resistance switching layer is conformity formed on the surface of an opening in the first dielectric layer, and the opening is between the two trenches. The top electrode structure is on the resistance switching layer and fills the opening. A top surface of the first dielectric layer, top surfaces of the bottom electrode structures, a top surface of the resistance switching layer, and a top surface of the top electrode structure are coplanar.
Public/Granted literature
- US20210159406A1 RESISTIVE RANDOM ACCESS MEMORY AND MANUFACTURING METHOD THEREOF Public/Granted day:2021-05-27
Information query
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