Invention Grant
- Patent Title: Variable reduction ratio spherical aberration correction electrostatic lens, wide angle energy analyzer, and two-dimensional electron spectrometer
-
Application No.: US17053270Application Date: 2019-08-05
-
Publication No.: US11791148B2Publication Date: 2023-10-17
- Inventor: Hiroyuki Matsuda , Hiroshi Daimon , Laszlo Toth
- Applicant: NATIONAL UNIVERSITY CORPORATION NARA INSTITUTE OF SCIENCE AND TECHNOLOGY
- Applicant Address: JP Nara
- Assignee: University Corporation National Nara Institute of Science and Technology
- Current Assignee: University Corporation National Nara Institute of Science and Technology
- Current Assignee Address: JP Nara
- Agency: Ogilvie Law Firm
- Priority: JP 18091020 2018.05.09 WO TJP2019018418 2019.05.08
- International Application: PCT/JP2019/018418 2019.08.05
- International Announcement: WO2019/216348A 2019.11.14
- Date entered country: 2020-11-05
- Main IPC: H01J49/06
- IPC: H01J49/06 ; H01J49/48

Abstract:
Provided is a compact two-dimensional electron spectrometer that is capable of variably adjusting the deceleration ratio over a wide range, and performing simultaneous measurement of the two-dimensional emission angle distribution with a high energy resolution over a wide solid angle of acquisition. The two-dimensional electron spectrometer is configured from: a variable deceleration ratio spherical aberration correction electrostatic lens; a cylindrical mirror type energy analyzer or a wide angle energy analyzer; and a projection lens. The variable deceleration ratio spherical aberration correction electrostatic lens is configured from: an electrostatic lens that consists of an axially symmetric spherical mesh having a concave shape with respect to a point source, and one or a plurality of axially symmetrical electrodes, and that adjusts the spherical aberration of charged particles generated from the point source; and an axially symmetric deceleration field generating electrode that is placed coaxially with the electrostatic lens.
Public/Granted literature
Information query