Invention Grant
- Patent Title: Microscope
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Application No.: US17420707Application Date: 2020-09-15
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Publication No.: US11798781B2Publication Date: 2023-10-24
- Inventor: Shuai Li , Wei He
- Applicant: FOCUS-EBEAM TECHNOLOGY (BEIJING) CO., LTD.
- Applicant Address: CN Beijing
- Assignee: FOCUS-EBEAM TECHNOLOGY (BEIJING) CO., LTD.
- Current Assignee: FOCUS-EBEAM TECHNOLOGY (BEIJING) CO., LTD.
- Current Assignee Address: CN Beijing
- Agency: SYNCODA LLC
- Agent Feng Ma
- Priority: CN 2010494563.6 2020.06.03
- International Application: PCT/CN2020/115424 2020.09.15
- International Announcement: WO2021/103751A 2021.06.03
- Date entered country: 2021-07-05
- Main IPC: H01J37/285
- IPC: H01J37/285 ; H01J37/20 ; H01J37/28

Abstract:
A microscope includes: an electronic optical column configured to emit scanning electron beams; a specimen stage configured to place a specimen; a target movably disposed between the electronic optical column and the specimen stage; and a driving mechanism for driving the target to move between a first position and a second position, wherein the first position is a position at which the electron beams act on the specimen, and the second position is a position at which the electron beams act on the target to generate X-rays irradiating the specimen. In the present disclosure, through one time mounting of the specimen, the microscope enables the dual-function detection of the specimen, i.e., detection of the specimen by an SEM and detection of the specimen by a Nano-CT.
Public/Granted literature
- US20220108870A1 MICROSCOPE Public/Granted day:2022-04-07
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