Invention Grant
- Patent Title: Optical objective lens
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Application No.: US16650862Application Date: 2018-09-25
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Publication No.: US11808930B2Publication Date: 2023-11-07
- Inventor: Jian Zhang , Zhiwen Kang , Yixiang Wang
- Applicant: ASML Netherlands B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML Netherlands B.V.
- Current Assignee: ASML Netherlands B.V.
- Current Assignee Address: NL Veldhoven
- Agency: FINNEGAN, HENDERSON, FARABOW, GARRETT & DUNNER, LLP
- International Application: PCT/EP2018/075926 2018.09.25
- International Announcement: WO2019/063528A 2019.04.04
- Date entered country: 2020-03-25
- Main IPC: G02B21/02
- IPC: G02B21/02 ; G02B9/00 ; G02B13/18 ; H01J37/22 ; H01J37/28 ; G09B9/10 ; G01N23/2251
Abstract:
An objective lens for forming an image of an object. The objective lens includes, sequentially from an image side to an object side, a first lens group having negative refractive power, and a second lens group having positive refractive power.
Public/Granted literature
- US20200278524A1 OPTICAL OBJECTIVE LENS Public/Granted day:2020-09-03
Information query
