Invention Grant
- Patent Title: Vacuum pumping system having multiple pumps
-
Application No.: US17611793Application Date: 2020-04-24
-
Publication No.: US11815079B2Publication Date: 2023-11-14
- Inventor: Andrew David Chew
- Applicant: Edwards Limited
- Applicant Address: GB Burgess Hill
- Assignee: Edwards Limited
- Current Assignee: Edwards Limited
- Current Assignee Address: GB Burgess Hill
- Agency: Westman, Champlin & Koehler, P.A.
- Agent Theodore M. Magee
- Priority: GB 07350 2019.05.24
- International Application: PCT/GB2020/051014 2020.04.24
- International Announcement: WO2020/240152A 2020.12.03
- Date entered country: 2021-11-16
- Main IPC: F04B37/02
- IPC: F04B37/02 ; F04B37/14 ; F04B41/06 ; F04B49/06 ; F04B37/08 ; H01J41/16 ; H01J7/18 ; C23C14/56 ; F04B7/02

Abstract:
A vacuum pumping system comprising: a high pressure getter pump configured to operate from an initial pressure of between 10 and 10−2 mbar to a second pressure between 10−3 mbar and 10−6 mbar and at least one high vacuum pump configured to operate at higher vacuums than the high pressure getter pump, the two pumps being mounted on a same flange, the flange being configured to mount the vacuum pumping system to a vacuum chamber.
Public/Granted literature
- US20220316462A1 A VACUUM PUMPING SYSTEM HAVING MULTIPLE PUMPS Public/Granted day:2022-10-06
Information query