公开(公告)号：US20220120282A1

公开(公告)日：2022-04-21

申请号：US17612869

申请日：2020-05-29

Applicant: Edwards Limited

Inventor： Andrew David Chew ,  Peter Charles Lamb

IPC: F04D19/04

Abstract: A turbomolecular pump, vacuum pumping system and method of evacuating a vacuum chamber is disclosed. The turbomolecular pump comprises: a rotor comprising a plurality of rotor blade rows, a stator comprising a plurality of stator blade rows and an outer casing, the rotor being rotatably mounted within the stator; wherein at least a portion of a surface of at least one of the rotor and the stator comprise a non-evaporable getter material.

公开(公告)号：US11815079B2

公开(公告)日：2023-11-14

申请号：US17611793

申请日：2020-04-24

Applicant: Edwards Limited

Inventor： Andrew David Chew

IPC: F04B37/02 ,  F04B37/14 ,  F04B41/06 ,  F04B49/06 ,  F04B37/08 ,  H01J41/16 ,  H01J7/18 ,  C23C14/56 ,  F04B7/02

CPC classification number: F04B7/02 ,  C23C14/564 ,  F04B37/08 ,  F04B37/14 ,  F04B41/06 ,  F04B49/06 ,  H01J7/18 ,  H01J41/16 ,  Y10S417/901

Abstract: A vacuum pumping system comprising: a high pressure getter pump configured to operate from an initial pressure of between 10 and 10−2 mbar to a second pressure between 10−3 mbar and 10−6 mbar and at least one high vacuum pump configured to operate at higher vacuums than the high pressure getter pump, the two pumps being mounted on a same flange, the flange being configured to mount the vacuum pumping system to a vacuum chamber.

公开(公告)号：US20220316462A1

公开(公告)日：2022-10-06

申请号：US17611793

申请日：2020-04-24

Applicant: Edwards Limited

Inventor： Andrew David Chew

IPC: F04B37/02 ,  F04B37/14 ,  F04B41/06 ,  F04B49/06

Abstract: A vacuum pumping system comprising: a high pressure getter pump configured to operate from an initial pressure of between 10 and 10−2 mbar to a second pressure between 10−3 mbar and 10−6 mbar and at least one high vacuum pump configured to operate at higher vacuums than the high pressure getter pump, the two pumps being mounted on a same flange, the flange being configured to mount the vacuum pumping system to a vacuum chamber.