Invention Grant
- Patent Title: Micro-transfer printing with selective component removal
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Application No.: US16919072Application Date: 2020-07-01
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Publication No.: US11854855B2Publication Date: 2023-12-26
- Inventor: Erich Radauscher , Ronald S. Cok , Christopher Andrew Bower , Matthew Alexander Meitl , James O. Thostenson
- Applicant: X Display Company Technology Limited
- Applicant Address: IE Dublin
- Assignee: X Display Company Technology Limited
- Current Assignee: X Display Company Technology Limited
- Current Assignee Address: IE Dublin
- Agency: Choate, Hall & Stewart LLP
- Agent William R. Haulbrook; Michael D. Schmitt
- Main IPC: H01L21/78
- IPC: H01L21/78 ; H01L21/30 ; H01L21/683 ; H01L21/56 ; H01L21/306 ; H01L23/31 ; H01L23/00 ; H01L25/00 ; H01L25/075 ; G03F7/00 ; H05K1/11 ; B29C59/02

Abstract:
An example of a method of micro-transfer printing comprises providing a micro-transfer printable component source wafer, providing a stamp comprising a body and spaced-apart posts, and providing a light source for controllably irradiating each of the posts with light through the body. Each of the posts is contacted to a component to adhere the component thereto. The stamp with the adhered components is removed from the component source wafer. The selected posts are irradiated through the body with the light to detach selected components adhered to selected posts from the selected posts, leaving non-selected components adhered to non-selected posts. In some embodiments, using the stamp, the selected components are adhered to a provided destination substrate. In some embodiments, the selected components are discarded. An example micro-transfer printing system comprises a stamp comprising a body and spaced-apart posts and a light source for selectively irradiating each of the posts with light.
Public/Granted literature
- US20200335380A1 MICRO-TRANSFER PRINTING WITH SELECTIVE COMPONENT REMOVAL Public/Granted day:2020-10-22
Information query
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