Invention Grant
- Patent Title: Measuring apparatus that measures height position or thickness of measurement-target object
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Application No.: US17452099Application Date: 2021-10-25
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Publication No.: US11860097B2Publication Date: 2024-01-02
- Inventor: Nobuyuki Kimura , Keiji Nomaru
- Applicant: DISCO CORPORATION
- Applicant Address: JP Tokyo
- Assignee: DISCO CORPORATION
- Current Assignee: DISCO CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Greer Burns & Crain Ltd.
- Priority: JP 20193148 2020.11.20
- Main IPC: G01N21/64
- IPC: G01N21/64 ; G01J3/44

Abstract:
A measuring apparatus includes a holding table that holds a measurement-target object and a measuring unit that measures a height or a thickness of the measurement-target object held by the holding table. The measuring unit includes a light source unit, an optical fiber that guides light emitted by the light source unit, and a light collector that focuses the light guided by the optical fiber on the measurement-target object held by the holding table. The light source unit includes an excitation light source, a fluorescent body that emits fluorescence when receiving excitation light emitted by the excitation light source, and a collecting lens that focuses the excitation light emitted by the excitation light source on the fluorescent body.
Public/Granted literature
- US20220163449A1 MEASURING APPARATUS THAT MEASURES HEIGHT POSITION OR THICKNESS OF MEASUREMENT-TARGET OBJECT Public/Granted day:2022-05-26
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