- Patent Title: High voltage transistor device and method for fabricating the same
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Application No.: US17943654Application Date: 2022-09-13
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Publication No.: US11869953B2Publication Date: 2024-01-09
- Inventor: Sheng-Yao Huang , Yu-Ruei Chen , Zen-Jay Tsai , Yu-Hsiang Lin
- Applicant: UNITED MICROELECTRONICS CORP.
- Applicant Address: TW Hsinchu
- Assignee: UNITED MICROELECTRONICS CORP
- Current Assignee: UNITED MICROELECTRONICS CORP
- Current Assignee Address: TW Hsinchu
- Agency: WPAT, P.C
- Priority: CN 2110086666.3 2021.01.22
- The original application number of the division: US17213868 2021.03.26
- Main IPC: H01L29/423
- IPC: H01L29/423 ; H01L21/28 ; H01L29/06

Abstract:
A high-voltage transistor device includes a semiconductor substrate, an isolation structure, a gate dielectric layer, a gate, a source region and a drain region. The semiconductor substrate has a plurality of grooves extending downward from a surface of the semiconductor substrate to form a sawtooth sectional profile. The isolation structure is disposed on the outside of the plurality of grooves, and extends from the surface downwards into the semiconductor substrate to define a high-voltage area. The gate dielectric layer is disposed on the high-voltage area and partially filled in the plurality of grooves. The gate is disposed on the gate dielectric layer. The source region and the drain region are respectively disposed in the semiconductor substrate and isolated from each other.
Public/Granted literature
- US20230006048A1 HIGH VOLTAGE TRANSISTOR DEVICE AND METHOD FOR FABRICATING THE SAME Public/Granted day:2023-01-05
Information query
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