- Patent Title: Semiconductor memory device and method for manufacturing the same
-
Application No.: US17963591Application Date: 2022-10-11
-
Publication No.: US11871558B2Publication Date: 2024-01-09
- Inventor: Yong-Hoon Son , Jae Hoon Kim , Kwang-ho Park , Seungjae Jung
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Gyeonggi-do
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: KR 20190168208 2019.12.16
- Main IPC: H01L29/786
- IPC: H01L29/786 ; H10B12/00 ; H01L29/06 ; H01L29/423 ; H01L29/66 ; H01L21/02 ; H01L21/306 ; H01L21/285

Abstract:
A semiconductor memory device includes a stack structure comprising a plurality of layers vertically stacked on a substrate, each layer including a semiconductor pattern, a gate electrode extending in a first direction on the semiconductor pattern, and a data storage element electrically connected to the semiconductor pattern, a plurality of vertical insulators penetrating the stack structure, the vertical insulators arranged in the first direction, and a bit line provided at a side of the stack structure and extending vertically. The bit line electrically connects the semiconductor patterns which are stacked. Each of the vertical insulators includes first and second vertical insulators adjacent to each other. The gate electrode includes a connection portion disposed between the first and second vertical insulators.
Public/Granted literature
- US20230031207A1 SEMICONDUCTOR MEMORY DEVICE AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2023-02-02
Information query
IPC分类: