Invention Grant
- Patent Title: Auto-tuning stage settling time with feedback in charged particle microscopy
-
Application No.: US17582769Application Date: 2022-01-24
-
Publication No.: US11887809B2Publication Date: 2024-01-30
- Inventor: Yuchen Deng , Erik Franken , Bart van Knippenberg , Holger Kohr
- Applicant: FEI Company
- Applicant Address: US OR Hillsboro
- Assignee: FEI Company
- Current Assignee: FEI Company
- Current Assignee Address: US OR Hillsboro
- Agency: Klarquist Sparkman, LLP
- Main IPC: H01J37/20
- IPC: H01J37/20 ; H01J37/26 ; H01J37/28

Abstract:
Computer-implemented methods for controlling a charged particle microscopy system include estimating a drift of a stage of the charged particle microscopy system based on an image sequence, and automatically adjusting a stage settling wait duration based on the drift estimate. Charged particle microscopy systems include an imaging system, a movement stage, and a processor and memory configured with computer-executable instructions that, when executed, cause the processor to estimate a stage settling duration of the movement stage based on an image sequence obtained with the imaging system, and automatically adjust a stage settling wait duration for the movement stage based on the stage settling duration.
Public/Granted literature
- US20230238207A1 AUTO-TUNING STAGE SETTLING TIME WITH FEEDBACK IN CHARGED PARTICLE MICROSCOPY Public/Granted day:2023-07-27
Information query