Invention Grant
- Patent Title: Laser-sustained plasma lamps with graded concentration of hydroxyl radical
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Application No.: US17880472Application Date: 2022-08-03
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Publication No.: US11887835B2Publication Date: 2024-01-30
- Inventor: Oleg Khodykin , Ilya Bezel
- Applicant: KLA Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA Corporation
- Current Assignee: KLA Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Suiter Swantz pc llo
- Main IPC: H01J61/30
- IPC: H01J61/30 ; H01J61/02
Abstract:
A plasma lamp is disclosed. The plasma lamp includes a gas containment structure configured to contain a gas and generate a plasma within the gas containment structure. The gas containment structure is formed from a glass material transparent to illumination from a pump laser and the broadband radiation emitted by the plasma. The gas containment structure includes a glass wall and the glass within the glass wall includes an OH concentration distribution that varies across a thickness of the glass wall.
Public/Granted literature
- US20230046314A1 LASER-SUSTAINED PLASMA LAMPS WITH GRADED CONCENTRATION OF HYDROXYL RADICAL Public/Granted day:2023-02-16
Information query
