Invention Grant
- Patent Title: Holding jig
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Application No.: US16683699Application Date: 2019-11-14
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Publication No.: US11887882B2Publication Date: 2024-01-30
- Inventor: Daisuke Matsuyama , Daisuke Hashimoto , Kazuyoshi Nishimoto , Tomoji Okuda
- Applicant: C. Uyemura & Co., Ltd.
- Applicant Address: JP Osaka
- Assignee: C. UYEMURA & CO., LTD.
- Current Assignee: C. UYEMURA & CO., LTD.
- Current Assignee Address: JP Osaka
- Agency: Wenderoth, Lind & Ponack, L.L.P.
- Priority: JP 18220245 2018.11.26
- Main IPC: H01L21/68
- IPC: H01L21/68 ; H01L21/687 ; H01L21/67 ; B05C13/02

Abstract:
An object of the present invention is to provide a holding jig that is used for applying a liquid bath treatment to a planar workpiece, has good cleaning capabilities, and avoids intimate contact of the planar workpiece with a rear member of the holding jig so that the planar workpiece can be easily detached from the holding jig after cleaning. A holding jig is used for applying a liquid bath treatment to a planar workpiece. The holding jig comprises a rear member, and a front member that faces the rear member and has an opening portion. The planar workpiece is disposed between the rear member and the front member, and the rear member has a plurality of projections formed on the surface of the rear member facing the front member.
Public/Granted literature
- US20200168499A1 HOLDING JIG Public/Granted day:2020-05-28
Information query
IPC分类: