Invention Grant
- Patent Title: Simultaneous double-side coating of multilayer graphene pellicle by local thermal processing
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Application No.: US16634910Application Date: 2018-06-26
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Publication No.: US11947256B2Publication Date: 2024-04-02
- Inventor: Evgenia Kurganova , Adrianus Johannes Maria Giesbers , Maxim Aleksandrovich Nasalevich , Arnoud Willem Notenboom , Mária Péter , Pieter-Jan Van Zwol , David Ferdinand Vles , Willem-Pieter Voorthuijzen
- Applicant: ASML NETHERLANDS B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML NETHERLANDS B.V.
- Current Assignee: ASML NETHERLANDS B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Pillsbury Winthrop Shaw Pittman, LLP
- Priority: EP 184701 2017.08.03
- International Application: PCT/EP2018/067052 2018.06.26
- International Announcement: WO2019/025082A 2019.02.07
- Date entered country: 2020-01-29
- Main IPC: G03F1/62
- IPC: G03F1/62 ; C01B32/186 ; G03F7/00
Abstract:
A method of manufacturing a pellicle for a lithographic apparatus, the method including locally heating the pellicle using radiative heating, and depositing coating material simultaneously on both sides of the pellicle, and pellicles manufactured according to this method. Also disclosed is the use of a multilayer graphene pellicle with a double-sided hexagonal boron nitride coating in a lithographic apparatus.
Public/Granted literature
- US20200159107A1 SIMULTANEOUS DOUBLE-SIDE COATING OF MULTILAYER GRAPHENE PELLICLE BY LOCAL THERMAL PROCESSING Public/Granted day:2020-05-21
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