Invention Grant
- Patent Title: Sample support
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Application No.: US17913211Application Date: 2021-01-14
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Publication No.: US11947260B2Publication Date: 2024-04-02
- Inventor: Akira Tashiro , Masahiro Kotani , Takayuki Ohmura
- Applicant: HAMAMATSU PHOTONICS K.K.
- Applicant Address: JP Hamamatsu
- Assignee: HAMAMATSU PHOTONICS K.K.
- Current Assignee: HAMAMATSU PHOTONICS K.K.
- Current Assignee Address: JP Hamamatsu
- Agency: Faegre Drinker Biddle & Reath LLP
- Priority: JP 20063689 2020.03.31
- International Application: PCT/JP2021/001075 2021.01.14
- International Announcement: WO2021/199573A 2021.10.07
- Date entered country: 2022-09-21
- Main IPC: H01J40/04
- IPC: H01J40/04 ; G03F7/004 ; G03F7/09 ; G03F7/16 ; H01J49/04

Abstract:
A sample support includes: a substrate having a plurality of through-holes opening on a first surface and on a second surface; a first member having a plurality of first openings and disposed on the first surface; a second member having a plurality of second openings and disposed on the second surface, and; a bonding member disposed between the first member and the second member; and a conductive layer integrally provided on a region of the second surface corresponding to each of the plurality of second openings. The plurality of through-holes include a plurality of first through-holes located between each of the plurality of first openings and each of the plurality of second openings, and a plurality of second through-holes located between the first member and the second member. Each of the plurality of second openings communicate with each of the plurality of first openings through the plurality of first through-holes.
Public/Granted literature
- US20230131548A1 SAMPLE SUPPORT Public/Granted day:2023-04-27
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