Invention Grant
- Patent Title: Guiding device
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Application No.: US17608505Application Date: 2020-04-03
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Publication No.: US11947264B2Publication Date: 2024-04-02
- Inventor: Patrick Willem Paul Limpens , Gerard Johannes Boogaard , Michaël Johannes Anna Maria Walters
- Applicant: ASML NETHERLANDS B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML NETHERLANDS B.V.
- Current Assignee: ASML NETHERLANDS B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Pillsbury Winthrop Shaw Pittman, LLP
- Priority: EP 173417 2019.05.09
- International Application: PCT/EP2020/059695 2020.04.03
- International Announcement: WO2020/224893A 2020.11.12
- Date entered country: 2021-11-03
- Main IPC: G03F7/20
- IPC: G03F7/20 ; G03F7/00 ; H02K41/03 ; H05G2/00

Abstract:
An actuator, configured to move a first object with respect to a second object, that includes a first body having an annular ring, a second body, arranged movably with respect to the first body, having a longitudinal shaft at least partially disposed within the annular ring, and at least one spring device, arranged between the first body and the second body, wherein the at least one spring device is configured to guide relative movements between the first body and the second body in a range of movement, and the at least one spring device has two or more leaf springs, wherein each of the two or more leaf springs is connected to the first body and to the second body, and wherein at least one of the leaf springs is in a non-planar state when the spring device is in an equilibrium position.
Public/Granted literature
- US20220229372A1 GUIDING DEVICE Public/Granted day:2022-07-21
Information query
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