Invention Grant
- Patent Title: Cleaning apparatus and polishing apparatus
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Application No.: US17128643Application Date: 2020-12-21
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Publication No.: US11948811B2Publication Date: 2024-04-02
- Inventor: Mitsuru Miyazaki , Tomoaki Fujimoto , Koichi Fukaya , Fumitoshi Oikawa , Takuya Inoue
- Applicant: EBARA CORPORATION
- Applicant Address: JP Tokyo
- Assignee: EBARA CORPORATION
- Current Assignee: EBARA CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: PEARNE & GORDON LLP
- Priority: JP 19236617 2019.12.26 JP 19236734 2019.12.26
- Main IPC: H01L21/67
- IPC: H01L21/67 ; B08B1/04 ; B08B3/02 ; B24B7/22 ; H01L21/687

Abstract:
A cleaning apparatus includes: a cleaning tank that defines a cleaning space for cleaning a wafer; a wafer rotation mechanism that is arranged inside the cleaning tank and holds and rotates the wafer; a cleaning member that contacts and cleans a surface of the wafer, is rotatable around a central axis extending in a lateral direction, and has a length in an axial direction longer than a radius of the wafer; a swing mechanism that swings the cleaning member around a swing axis located inside the cleaning tank to move the cleaning member from a retracted position outside of the wafer to a cleaning position directly above the wafer; a second cleaning means that cleans the surface of the wafer; and a second swing mechanism that swings the second cleaning means around a second swing axis located inside the cleaning tank to pass directly above a center of the wafer.
Public/Granted literature
- US20210202273A1 CLEANING APPARATUS AND POLISHING APPARATUS Public/Granted day:2021-07-01
Information query
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