Invention Grant
- Patent Title: Method for setting an airborne molecular contamination measurement station, and measurement station
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Application No.: US17425061Application Date: 2020-01-22
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Publication No.: US11953484B2Publication Date: 2024-04-09
- Inventor: Julien Bounouar , Olivier Le Barillec , Nicolas Chapel
- Applicant: PFEIFFER VACUUM
- Applicant Address: FR Annecy
- Assignee: PFEIFFER VACUUM
- Current Assignee: PFEIFFER VACUUM
- Current Assignee Address: FR Annecy
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: FR 01091 2019.02.05
- International Application: PCT/EP2020/051539 2020.01.22
- International Announcement: WO2020/160910A 2020.08.13
- Date entered country: 2021-07-22
- Main IPC: G01N33/00
- IPC: G01N33/00 ; G01N1/22 ; G01N1/26 ; G05D7/06

Abstract:
A setting method includes setting the conductances of the controllable restrictions of an airborne molecular contamination measurement station. The setting method includes an initial identification step, prior to the carrying-out of an airborne molecular contamination measurement step, and during which the sampling line that has the lowest conductance when the conductance of the controllable restriction of the said sampling line is set to its maximum value is determined, and an initial conductance-setting step prior to the carrying-out of the measurement step and after the initial identification step, and during which the conductances of the controllable restrictions are set to make them correspond to the lowest conductance determined in the initial identification step. Further, a measurement station is provided for measuring airborne molecular contamination.
Public/Granted literature
- US20220099646A1 METHOD FOR SETTING AN AIRBORNE MOLECULAR CONTAMINATION MEASUREMENT STATION, AND MEASUREMENT STATION Public/Granted day:2022-03-31
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