Invention Grant
- Patent Title: Organo tin compound for thin film deposition and method for forming tin-containing thin film using same
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Application No.: US17717612Application Date: 2022-04-11
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Publication No.: US11958874B2Publication Date: 2024-04-16
- Inventor: Jang Keun Sim , Sung Jun Ji , Tae Young Lee , Shin Beom Kim , Sun Young Baik , Tae Hwan Lim , Dong Kyun Lee , Sang Hyun Lee , Su Pill Chun
- Applicant: EGTM Co., Ltd. , SK hynix Inc.
- Applicant Address: KR Suwon-Si
- Assignee: EGTM Co., Ltd.,SK hynix Inc.
- Current Assignee: EGTM Co., Ltd.,SK hynix Inc.
- Current Assignee Address: KR Suwon-Si; KR Icheon-Si
- Priority: KR 20210078817 2021.06.17
- Main IPC: C07F7/22
- IPC: C07F7/22 ; B05D1/00 ; C23C16/448 ; C23C16/455

Abstract:
According to the embodiment of the present disclosure, an organo tin compound is represented by the following Chemical Formula 1:
In Chemical Formula 1,
L1 and L2 are each independently selected from an alkoxy group having 1 to 10 carbon atoms and an alkylamino group having 1 to 10 carbon atoms,
R1 is a substituted or unsubstituted aryl group having 6 to 8 carbon atoms, and
R2 is selected from a substituted or unsubstituted linear alkyl group having 1 to 4 carbon atoms, a branched alkyl group having 3 to 4 carbon atoms, a cycloalkyl group having 3 to 6 carbon atoms, and an allyl group having 2 to 4 carbon atoms.
In Chemical Formula 1,
L1 and L2 are each independently selected from an alkoxy group having 1 to 10 carbon atoms and an alkylamino group having 1 to 10 carbon atoms,
R1 is a substituted or unsubstituted aryl group having 6 to 8 carbon atoms, and
R2 is selected from a substituted or unsubstituted linear alkyl group having 1 to 4 carbon atoms, a branched alkyl group having 3 to 4 carbon atoms, a cycloalkyl group having 3 to 6 carbon atoms, and an allyl group having 2 to 4 carbon atoms.
Public/Granted literature
- US20220402946A1 ORGANO TIN COMPOUND FOR THIN FILM DEPOSITION AND METHOD FOR FORMING TIN-CONTAINING THIN FILM USING SAME Public/Granted day:2022-12-22
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