Invention Grant
- Patent Title: Dual threshold voltage (VT) channel devices and their methods of fabrication
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Application No.: US15773536Application Date: 2015-12-23
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Publication No.: US11967615B2Publication Date: 2024-04-23
- Inventor: Hsu-Yu Chang , Neville L. Dias , Walid M. Hafez , Chia-Hong Jan , Roman W. Olac-Vaw , Chen-Guan Lee
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Schwabe, Williamson & Wyatt, P.C.
- International Application: PCT/US2015/000506 2015.12.23
- International Announcement: WO2017/111874A 2017.06.29
- Date entered country: 2018-05-03
- Main IPC: H01L29/10
- IPC: H01L29/10 ; H01L21/265 ; H01L29/66 ; H01L29/78 ; H01L29/161 ; H01L29/165

Abstract:
Embodiments of the present invention are directed to dual threshold voltage (VT) channel devices and their methods of fabrication. In an example, a semiconductor device includes a gate stack disposed on a substrate, the substrate having a first lattice constant. A source region and a drain region are formed on opposite sides of the gate electrode. A channel region is disposed beneath the gate stack and between the source region and the drain region. The source region is disposed in a first recess having a first depth and the drain region disposed in a second recess having a second depth. The first recess is deeper than the second recess. A semiconductor material having a second lattice constant different than the first lattice constant is disposed in the first recess and the second recess.
Public/Granted literature
- US20180323260A1 DUAL THRESHOLD VOLTAGE (VT) CHANNEL DEVICES AND THEIR METHODS OF FABRICATION Public/Granted day:2018-11-08
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