Invention Grant
- Patent Title: Multiple-stack three-dimensional memory device and fabrication method thereof
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Application No.: US17072958Application Date: 2020-10-16
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Publication No.: US11968832B2Publication Date: 2024-04-23
- Inventor: Jun Liu , Zongliang Huo , Li Hong Xiao , Zhenyu Lu , Qian Tao , Yushi Hu , Sizhe Li , Zhao Hui Tang , Yu Ting Zhou , Zhaosong Li
- Applicant: Yangtze Memory Technologies Co., Ltd.
- Applicant Address: CN Hubei
- Assignee: Yangtze Memory Technologies Co., Ltd.
- Current Assignee: Yangtze Memory Technologies Co., Ltd.
- Current Assignee Address: CN Hubei
- Agency: Sterne, Kessler, Goldstein & Fox P.L.L.C.
- The original application number of the division: US16126919 2018.09.10
- Main IPC: H10B43/27
- IPC: H10B43/27 ; H01L21/033 ; H01L21/308 ; H01L23/532 ; H10B43/35 ; H10B43/40

Abstract:
Methods and structures of a three-dimensional memory device are disclosed. In an example, the disclosed method comprises forming a plurality of dielectric stacks stacked on one another over a substrate to create a multiple-stack staircase structure. Each one of the plurality of dielectric stacks comprises a plurality of dielectric pairs arranged along a direction perpendicular to a top surface of the substrate. The method further comprises forming a filling structure that surrounds the multiple-stack staircase structure, forming a semiconductor channel extending through the multiple-staircase structure, wherein the semiconductor channel comprises unaligned sidewall surfaces, and forming a supporting pillar extending through at least one of the multiple-staircase structure and the filling structure, wherein the supporting pillar comprises aligned sidewall surfaces.
Public/Granted literature
- US20210043651A1 MULTIPLE-STACK THREE-DIMENSIONAL MEMORY DEVICE AND FABRICATION METHOD THEREOF Public/Granted day:2021-02-11
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