Invention Grant
- Patent Title: Methods and devices for extending a time period until changing a measuring tip of a scanning probe microscope
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Application No.: US17829922Application Date: 2022-06-01
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Publication No.: US11977097B2Publication Date: 2024-05-07
- Inventor: Gabriel Baralia , Rainer Becker , Kinga Kornilov , Christof Baur , Hans Hermann Pieper
- Applicant: Carl Zeiss SMT GmbH
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Priority: DE 2016223659.8 2016.11.29
- The original application number of the division: US16423687 2019.05.28
- Main IPC: G01Q70/16
- IPC: G01Q70/16 ; G01Q60/38 ; G01Q70/08 ; H01J37/305 ; H01J37/317
Abstract:
The present invention relates to methods and devices for extending a time period until changing a measuring tip of a scanning probe microscope. In particular, the invention relates to a method for hardening a measuring tip for a scanning probe microscope, comprising the step of: Processing the measuring tip with a beam of an energy beam source, the energy beam source being part of a scanning electron microscope.
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