Invention Grant
- Patent Title: Memory cells with ferroelectric capacitors separate from transistor gate stacks
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Application No.: US16906217Application Date: 2020-06-19
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Publication No.: US11980037B2Publication Date: 2024-05-07
- Inventor: Nazila Haratipour , Shriram Shivaraman , Sou-Chi Chang , Jack T. Kavalieros , Uygar E. Avci , Chia-Ching Lin , Seung Hoon Sung , Ashish Verma Penumatcha , Ian A. Young , Devin R. Merrill , Matthew V. Metz , I-Cheng Tung
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Akona IP PC
- Main IPC: H10B53/30
- IPC: H10B53/30 ; H01L21/768 ; H01L23/522

Abstract:
Described herein are ferroelectric (FE) memory cells that include transistors having gate stacks separate from FE capacitors of these cells. An example memory cell may be implemented as an IC device that includes a support structure (e.g., a substrate) and a transistor provided over the support structure and including a gate stack. The IC device also includes a FE capacitor having a first capacitor electrode, a second capacitor electrode, and a capacitor insulator of a FE material between the first capacitor electrode and the second capacitor electrode, where the FE capacitor is separate from the gate stack (i.e., is not integrated within the gate stack and does not have any layers that are part of the gate stack). The IC device further includes an interconnect structure, configured to electrically couple the gate stack and the first capacitor electrode.
Public/Granted literature
- US20210398993A1 MEMORY CELLS WITH FERROELECTRIC CAPACITORS SEPARATE FROM TRANSISTOR GATE STACKS Public/Granted day:2021-12-23
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