Invention Grant
- Patent Title: Radiation system
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Application No.: US16743025Application Date: 2020-01-15
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Publication No.: US11984236B2Publication Date: 2024-05-14
- Inventor: Han-Kwang Nienhuys , Rilpho Ludovicus Donker , Gosse Charles De Vries
- Applicant: ASML NETHERLANDS B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML NETHERLANDS B.V.
- Current Assignee: ASML NETHERLANDS B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Pillsbury Winthrop Shaw Pittman, LLP
- Priority: EP 157192 2015.03.02 EP 168832 2015.05.22 EP 189676 2015.10.14
- Main IPC: G03F7/00
- IPC: G03F7/00 ; G02B5/02 ; G21K1/06 ; H01S3/23 ; H05G2/00

Abstract:
A radiation system includes a beam splitting apparatus configured to split a main radiation beam into a plurality of branch radiation beams and a radiation alteration device arranged to receive an input radiation beam and output a modified radiation beam, wherein the radiation alteration device is configured to provide an output modified radiation beam which has an increased etendue, when compared to the received input radiation beam, wherein the radiation alteration device is arranged such that the input radiation beam which is received by the radiation alteration device is a main radiation beam and the radiation alteration device is configured to provide a modified main radiation beam to the beam splitting apparatus, or wherein the radiation alteration device is arranged such that the input radiation beam which is received by the radiation alteration device is a branch radiation beam output from the beam splitting apparatus.
Public/Granted literature
- US20200152345A1 RADIATION SYSTEM Public/Granted day:2020-05-14
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