Invention Grant
- Patent Title: Emitter, electron gun in which same is used, electronic device in which same is used, and method for manufacturing same
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Application No.: US17622994Application Date: 2020-06-29
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Publication No.: US11984294B2Publication Date: 2024-05-14
- Inventor: Jie Tang , Shuai Tang , Ta-Wei Chiu , Wataru Hayami , Luchang Qin
- Applicant: NATIONAL INSTITUTE FOR MATERIALS SCIENCE
- Applicant Address: JP Ibaraki
- Assignee: NATIONAL INSTITUTE FOR MATERIALS SCIENCE
- Current Assignee: NATIONAL INSTITUTE FOR MATERIALS SCIENCE
- Current Assignee Address: JP Ibaraki
- Agency: Wenderoth, Lind & Ponack, L.L.P.
- Priority: JP 19123570 2019.07.02
- International Application: PCT/JP2020/025435 2020.06.29
- International Announcement: WO2021/002305A 2021.01.07
- Date entered country: 2021-12-27
- Main IPC: H01J37/065
- IPC: H01J37/065

Abstract:
The present invention provides an emitter made of a hafnium carbide (HfC) single crystal that stably emits electrons with high efficiency, a method for manufacturing the emitter, and an electron gun and an electronic device using the emitter. An emitter according to an embodiment of the present invention is an emitter including a nanowire, in which the nanowire is made of the hafnium carbide (HfC) single crystal, at least an end of the nanowire through which electrons are to be emitted is coated with hafnium oxycarbide (HfC1-xOx: 0
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