Invention Grant
- Patent Title: Micromechanical component for a rotation rate sensor and corresponding manufacturing method
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Application No.: US17908081Application Date: 2021-04-14
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Publication No.: US11988511B2Publication Date: 2024-05-21
- Inventor: Matthias Kuehnel , Nils Felix Kuhlmann , Robert Maul , Rolf Scheben , Steffen Markisch , Thorsten Balslink , Wolfram Geiger
- Applicant: Robert Bosch GmbH
- Applicant Address: DE Stuttgart
- Assignee: ROBERT BOSCH GMBH
- Current Assignee: ROBERT BOSCH GMBH
- Current Assignee Address: DE Stuttgart
- Agency: NORTON ROSE FULBRIGHT US LLP
- Agent Gerard A. Messina
- Priority: DE 2020205369.3 2020.04.28
- International Application: PCT/EP2021/059639 2021.04.14
- International Announcement: WO2021/219374A 2021.11.04
- Date entered country: 2022-08-30
- Main IPC: G01C19/5712
- IPC: G01C19/5712 ; G01C19/5684 ; G01C25/00

Abstract:
A micromechanical component for a rotation rate sensor. The micromechanical component includes two rotor masses, mirror symmetrical with respect to a first plane of symmetry aligned perpendicularly to a substrate surface and passing through the center of the two rotor masses, which may be set in rotational vibrating motion about rotational axes aligned perpendicularly to the substrate surface, and four seismic masses, mirror symmetrical with respect to the first plane of symmetry, deflectable in parallel to the first plane of symmetry using the two rotor masses set in their respective rotational vibrating motion. The first rotor mass and a first pair of the four seismic masses connected thereto are mirror symmetrical to the second rotor mass and to a second pair of the four seismic masses connected thereto with respect to a second plane of symmetry aligned perpendicularly to the substrate surface and to the first plane of symmetry.
Public/Granted literature
- US20230095336A1 MICROMECHANICAL COMPONENT FOR A ROTATION RATE SENSOR AND CORRESPONDING MANUFACTURING METHOD Public/Granted day:2023-03-30
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