Invention Grant
- Patent Title: Wafer boat handling device, vertical batch furnace and method
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Application No.: US16874452Application Date: 2020-05-14
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Publication No.: US11996309B2Publication Date: 2024-05-28
- Inventor: Christianus G. M. de Ridder
- Applicant: ASM IP Holding B.V.
- Applicant Address: NL Almere
- Assignee: ASM IP Holding B.V.
- Current Assignee: ASM IP Holding B.V.
- Current Assignee Address: NL Almere
- Agency: Snell & Wilmer L.L.P.
- Main IPC: F23D3/12
- IPC: F23D3/12 ; F27B17/00 ; F27D3/00 ; F27D3/12 ; H01L21/67 ; H01L21/673 ; F27D9/00 ; F27D15/02

Abstract:
A wafer boat handling device, configured to be positioned under a process chamber of a vertical batch furnace. The wafer boat handling device comprises a main housing having a wall defining and bounding a wafer boat handling space, and a boat transporter comprising a wafer boat support for supporting a wafer boat and configured to transport the wafer boat to a cooldown position within the wafer boat handling space. A part of the wall adjacent the cooldown position is a wall part with a heat radiation surface absorptance of at least 0.60 so as to withdraw heat from the wafer boat which is in the cooldown position by means of heat radiation absorption.
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