Invention Grant
- Patent Title: High-frequency power supply device
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Application No.: US17581039Application Date: 2022-01-21
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Publication No.: US12009755B2Publication Date: 2024-06-11
- Inventor: Naoki Yasuda
- Applicant: SHIMADZU CORPORATION
- Applicant Address: JP Kyoto
- Assignee: Shimadzu Corporation
- Current Assignee: Shimadzu Corporation
- Current Assignee Address: JP Kyoto
- Agency: Muir Patent Law, PLLC
- Priority: JP 21011930 2021.01.28
- Main IPC: H02M3/338
- IPC: H02M3/338 ; H01J37/32 ; H02M7/00 ; H02M7/48 ; H02M7/5383

Abstract:
Provided is a high-frequency power supply device capable of causing an appropriate current to flow through a transformer. A self-oscillation high-frequency power supply device is provided with a DC power supply, an LC resonant circuit, a switching circuit, and a transformer. The LC resonant circuit includes an induction coil for plasma generation and a capacitor. The switching circuit includes a semiconductor element, the switching circuit being configured to subject DC power supplied from the DC power supply to switching processing to supply high-frequency power to the LC resonant circuit. The transformer includes a primary coil included in the LC resonant circuit and a secondary coil connected to the semiconductor element to turn on/off a semiconductor element. The transformer has a coaxial structure in which the primary coil and the secondary coil are coaxially provided. The LC resonant circuit includes a resistor connected in parallel to the primary coil.
Public/Granted literature
- US20220239229A1 HIGH-FREQUENCY POWER SUPPLY DEVICE Public/Granted day:2022-07-28
Information query
IPC分类: