公开(公告)号：US12009755B2

公开(公告)日：2024-06-11

申请号：US17581039

申请日：2022-01-21

Applicant: SHIMADZU CORPORATION

Inventor： Naoki Yasuda

IPC: H02M3/338 ,  H01J37/32 ,  H02M7/00 ,  H02M7/48 ,  H02M7/5383

CPC classification number: H02M3/3385 ,  H01J37/321 ,  H01J37/32174 ,  H02M7/003 ,  H02M7/4815 ,  H02M7/4818 ,  H02M7/5383

Abstract: Provided is a high-frequency power supply device capable of causing an appropriate current to flow through a transformer. A self-oscillation high-frequency power supply device is provided with a DC power supply, an LC resonant circuit, a switching circuit, and a transformer. The LC resonant circuit includes an induction coil for plasma generation and a capacitor. The switching circuit includes a semiconductor element, the switching circuit being configured to subject DC power supplied from the DC power supply to switching processing to supply high-frequency power to the LC resonant circuit. The transformer includes a primary coil included in the LC resonant circuit and a secondary coil connected to the semiconductor element to turn on/off a semiconductor element. The transformer has a coaxial structure in which the primary coil and the secondary coil are coaxially provided. The LC resonant circuit includes a resistor connected in parallel to the primary coil.