Invention Grant
- Patent Title: Enclosure system shelf including alignment features
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Application No.: US17206036Application Date: 2021-03-18
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Publication No.: US12027397B2Publication Date: 2024-07-02
- Inventor: Aaron Green , Nicholas Michael Bergantz , John C. Menk
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc
- Current Assignee: Applied Materials, Inc
- Current Assignee Address: US CA Santa Clara
- Agency: Lowenstein Sandler LLP
- Main IPC: H01L21/673
- IPC: H01L21/673

Abstract:
A set of one or more shelves is configured to be disposed within an enclosure system of a substrate processing system. The set of one or more shelves includes first upper surfaces disposed substantially in a first plane, carrier alignment features configured to align a carrier on the first upper surfaces, second upper surfaces disposed substantially in a second plane that is above the first plane, and process kit ring alignment features configured to align a process kit ring on the carrier above the second upper surfaces.
Public/Granted literature
- US20210296149A1 ENCLOSURE SYSTEM SHELF Public/Granted day:2021-09-23
Information query
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