Invention Grant
- Patent Title: Devices comprising crystalline materials
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Application No.: US18050772Application Date: 2022-10-28
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Publication No.: US12057472B2Publication Date: 2024-08-06
- Inventor: Michael Mutch , Manuj Nahar , Wayne I. Kinney
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: TraskBritt
- The original application number of the division: US16121966 2018.09.05
- Main IPC: H01L29/04
- IPC: H01L29/04 ; H01L21/02 ; H01L21/324 ; H01L29/161 ; H01L27/105 ; H01L29/786

Abstract:
A method includes forming a semiconductor structure. The structure includes a first material, a blocking material, a second material in an amorphous form, and a third material in an amorphous form. The blocking material is disposed between the first material and the second material. At least the second material and the third material each comprise silicon and/or germanium. The structure is exposed to a temperature above a crystallization temperature of the third material and below a crystallization temperature of the second material. Semiconductor structures, memory devices, and systems are also disclosed.
Public/Granted literature
- US20230074063A1 DEVICES COMPRISING CRYSTALLINE MATERIALS Public/Granted day:2023-03-09
Information query
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