Invention Grant
- Patent Title: Microwave resonator array for plasma diagnostics
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Application No.: US17395351Application Date: 2021-08-05
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Publication No.: US12062529B2Publication Date: 2024-08-13
- Inventor: David John Peterson , Chuang-Chia Lin
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Schwabe, Williamson & Wyatt, P.C.
- Main IPC: H01J37/32
- IPC: H01J37/32

Abstract:
Embodiments disclosed herein include sensor devices and methods of using the sensor devices. In an embodiment, a sensor device comprises a substrate, a support extending up from the substrate, and a resonator mechanically coupled to the support. In an embodiment, the sensor device further comprises an antenna that is configured to electromagnetically couple with the resonator, wherein the antenna is connected to a transmission line in the substrate.
Public/Granted literature
- US20230044262A1 MICROWAVE RESONATOR ARRAY FOR PLASMA DIAGNOSTICS Public/Granted day:2023-02-09
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