Invention Grant
- Patent Title: Autoteach system
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Application No.: US17850296Application Date: 2022-06-27
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Publication No.: US12076863B2Publication Date: 2024-09-03
- Inventor: Nicholas Michael Kopec , Lyle Kosinski , Matvey Farber , Jeffrey Hudgens
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Lowenstein Sandler LLP
- Main IPC: H01L21/67
- IPC: H01L21/67 ; B25J9/16 ; B25J21/00 ; H01L21/00 ; H01L21/673
Abstract:
An autoteach system includes an autoteach pin that is a scannable feature having a fixed position within the autoteach system. The autoteach pin enables an autoteach operation of a robot arm of the wafer processing system. The autoteach operation is an operation to automatically teach the fixed position within the autoteach system to the robot arm of the wafer processing system. The autoteach pin includes a first portion including a cylindrical sidewall. The robot arm is to use the first portion to locate the fixed position within the autoteach system. The autoteach portion further includes a second portion including planar sidewalls that are configured to enable calibration of robot arm error.
Public/Granted literature
- US20220324100A1 AUTOTEACH SYSTEM Public/Granted day:2022-10-13
Information query
IPC分类:
