Invention Grant
- Patent Title: Dithering or dynamic offsets for improved uniformity
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Application No.: US17025025Application Date: 2020-09-18
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Publication No.: US12077861B2Publication Date: 2024-09-03
- Inventor: Joseph AuBuchon , Sanjeev Baluja , Michael Rice , Arkaprava Dan , Hanhong Chen
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Servilla Whitney LLC
- Main IPC: C23C16/458
- IPC: C23C16/458 ; C23C16/455 ; C23C16/52

Abstract:
Apparatus and methods to process one or more substrates are described. A plurality of process stations are arranged in a circular configuration around a rotational axis. A support assembly with a rotatable center base defining a rotational axis, at least two support arms extending from the center base and heaters on each of the support arms is positioned adjacent the processing stations so that the heaters can be moved amongst the various process stations to perform one or more process condition. The support assembly configured to offset the position of the substrate with respect to the processing stations.
Public/Granted literature
- US20210087681A1 Dithering Or Dynamic Offsets For Improved Uniformity Public/Granted day:2021-03-25
Information query
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