Invention Grant
- Patent Title: Bonding apparatus and alignment method
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Application No.: US18010458Application Date: 2021-08-26
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Publication No.: US12080679B2Publication Date: 2024-09-03
- Inventor: Toru Maeda , Osamu Kakutani
- Applicant: SHINKAWA LTD.
- Applicant Address: JP Tokyo
- Assignee: SHINKAWA LTD.
- Current Assignee: SHINKAWA LTD.
- Current Assignee Address: JP Tokyo
- Agency: JCIPRNET
- International Application: PCT/JP2021/031360 2021.08.26
- International Announcement: WO2023/026430A 2023.03.02
- Date entered country: 2022-12-15
- Main IPC: B23K20/00
- IPC: B23K20/00 ; B23K20/10 ; H01L23/00 ; B23K101/40

Abstract:
A bonding apparatus includes: a clamper able to clamp a wire between a pair of arms; a horn, in which a first through hole able to hold a capillary, and a second through hole adjacent to the first through hole and penetrating the horn in an up-down direction are further formed; and a bonding stage able to carry a workpiece. An alignment method for aligning a horn and a damper of a bonding apparatus with each other includes: disposing a mirror surface to be parallel to a bonding stage; aligning a mirror image of a second through hole reflected on the mirror surface with a center of the second through hole when the mirror surface is viewed through the second through hole; and aligning the damper based on a position of the mirror image and the horn.
Public/Granted literature
- US20240105673A1 BONDING APPARATUS AND ALIGNMENT METHOD Public/Granted day:2024-03-28
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