Invention Grant
- Patent Title: Line narrowing device, electronic device manufacturing method
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Application No.: US17818916Application Date: 2022-08-10
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Publication No.: US12111577B2Publication Date: 2024-10-08
- Inventor: Takahito Kumazaki , Osamu Wakabayashi
- Applicant: Gigaphoton Inc.
- Applicant Address: JP Tochigi
- Assignee: Gigaphoton Inc.
- Current Assignee: Gigaphoton Inc.
- Current Assignee Address: JP Tochigi
- Agency: Studebaker & Brackett PC
- Main IPC: G03F7/00
- IPC: G03F7/00 ; H01S3/08 ; H01S3/106

Abstract:
A line narrowing device includes first and second prisms disposed at positions different in a wavelength dispersion direction of any of the first and second prisms, a third prism disposed on the optical path of an optical beam and through which the beam width of the optical beam is enlarged and first and second parts of the optical beam are incident on the first and second prisms, respectively, a grating disposed across the optical path of the first part having passed through the first prism and the optical path of the second part having passed through the second prism, a first actuator configured to adjust the incident angle of the first part on the grating, a second actuator configured to adjust the incident angle of the second part on the grating, and a third actuator configured to adjust an energy ratio of the first and second parts.
Public/Granted literature
- US20220385027A1 LINE NARROWING DEVICE, ELECTRONIC DEVICE MANUFACTURING METHOD Public/Granted day:2022-12-01
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