Invention Grant
- Patent Title: Method of fabricating resistive random access memory cell
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Application No.: US18463268Application Date: 2023-09-07
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Publication No.: US12114579B2Publication Date: 2024-10-08
- Inventor: Po-Yen Hsu , Bo-Lun Wu , Tse-Mian Kuo
- Applicant: Winbond Electronics Corp.
- Applicant Address: TW Taichung
- Assignee: Winbond Electronics Corp.
- Current Assignee: Winbond Electronics Corp.
- Current Assignee Address: TW Taichung
- Agency: JCIPRNET
- Priority: TW 0115318 2021.04.28
- The original application number of the division: US17465840 2021.09.02
- Main IPC: G11C11/00
- IPC: G11C11/00 ; H10B63/00 ; H10N70/00

Abstract:
A method of fabricating a resistive random access memory cell includes the following steps. A second sacrificial layer is formed around a patterned stacked layer. An opening passing through first conductive layers and first sacrificial layers of the patterned stacked layer is formed. A second conductive layer is formed in the opening, and the second conductive layer and the first conductive layers form a first electrode layer. The first sacrificial layers and the second sacrificial layer are removed. A variable resistance layer and an oxygen reservoir layer are formed. The oxygen reservoir layer is patterned to form a patterned oxygen reservoir layer and expose the variable resistance layer. A second dielectric layer is formed on the variable resistance layer and the patterned oxygen reservoir layer. A second electrode is formed in the second dielectric layer.
Public/Granted literature
- US20230422638A1 METHOD OF FABRICATING RESISTIVE RANDOM ACCESS MEMORY CELL Public/Granted day:2023-12-28
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