- Patent Title: Quartz susceptor for accurate non-contact temperature measurement
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Application No.: US17464657Application Date: 2021-09-01
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Publication No.: US12134835B2Publication Date: 2024-11-05
- Inventor: Kim Ramkumar Vellore
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan, LLP
- Main IPC: C30B25/12
- IPC: C30B25/12 ; C30B25/10 ; G01J5/08 ; H01L21/687

Abstract:
The present disclosure generally relates to a substrate support for processing of semiconductor substrates. In one example, the substrate support has a body. The body has a top surface configured to support a substrate thereon. The body has a bottom surface opposite the top surface. The body has an upper portion disposed at the top surface and a lower portion disposed at the bottom surface. An IR blocking material is encased by the upper portion and the lower portion, wherein the IR blocking material is an optically opaque at IR wavelengths and the lower portion is optically transparent at IR wavelengths.
Public/Granted literature
- US20230066087A1 QUARTZ SUSCEPTOR FOR ACCURATE NON-CONTACT TEMPERATURE MEASUREMENT Public/Granted day:2023-03-02
Information query
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