Invention Grant
- Patent Title: Systems and methods of hysteresis compensation
-
Application No.: US18059585Application Date: 2022-11-29
-
Publication No.: US12183537B2Publication Date: 2024-12-31
- Inventor: Edwin Verschueren , Paul Tacx
- Applicant: FEI Company
- Applicant Address: US OR Hillsboro
- Assignee: FEI Company
- Current Assignee: FEI Company
- Current Assignee Address: US OR Hillsboro
- Agency: Klarquist Sparkman, LLP
- Main IPC: H01J37/02
- IPC: H01J37/02 ; H01J37/28 ; H02N2/06

Abstract:
A positioning system can include a drive unit having an actuator element and a control system. The actuator element can include a piezoelectric material. The control system can be configured to select a path between a first position and a second position, identify at least one change of direction of the actuator element along the selected path, generate a hysteresis-compensated drive signal based at least in part on the change in direction, and apply the hysteresis-compensated drive signal to the actuator element to move an object along the path.
Public/Granted literature
- US20230101676A1 SYSTEMS AND METHODS OF HYSTERESIS COMPENSATION Public/Granted day:2023-03-30
Information query