Invention Grant
- Patent Title: EUV light generation apparatus, electronic device manufacturing method, and inspection method
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Application No.: US17934469Application Date: 2022-09-22
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Publication No.: US12185449B2Publication Date: 2024-12-31
- Inventor: Fumio Iwamoto , Yutaka Shiraishi
- Applicant: Gigaphoton Inc.
- Applicant Address: JP Tochigi
- Assignee: Gigaphoton Inc.
- Current Assignee: Gigaphoton Inc.
- Current Assignee Address: JP Tochigi
- Agency: Studebaker & Brackett PC
- Priority: JP2021-184363 20211111
- Main IPC: H05G2/00
- IPC: H05G2/00 ; G01N21/88 ; G03F7/00

Abstract:
An EUV light generation apparatus to generate EUV light by irradiating a target with pulse laser light to turn the target into plasma includes a chamber, a target supply unit configured to supply the target to a plasma generation region in the chamber, a pulse laser device configured to generate pulse laser light to be radiated to the target, and a processor configured to change a generation frequency of the target generated by the target supply unit to a natural number multiple of an irradiation frequency of the pulse laser light based on a size of the target or related information related to the size of the target.
Public/Granted literature
- US20230142875A1 EUV LIGHT GENERATION APPARATUS, ELECTRONIC DEVICE MANUFACTURING METHOD, AND INSPECTION METHOD Public/Granted day:2023-05-11
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