Invention Grant
- Patent Title: Bonding apparatus, bonding system, and bonding method
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Application No.: US17594973Application Date: 2020-04-27
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Publication No.: US12217963B2Publication Date: 2025-02-04
- Inventor: Yutaka Yamasaki , Takashi Terada
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: Chrisman Gallo Tochtrop LLC
- Priority: JP2019-088114 20190508
- International Application: PCT/JP2020/018007 WO 20200427
- International Announcement: WO2020/226093 WO 20201112
- Main IPC: H01L23/544
- IPC: H01L23/544 ; B23K20/02 ; B23K20/233 ; B23K20/24 ; H01L21/18 ; H01L21/67

Abstract:
A bonding apparatus configured to bond a first substrate and a second substrate includes: a first holder configured to hold the first substrate; a second holder disposed to face the first holder in a vertical direction, and configured to hold the second substrate; a processing vessel accommodating the first holder and the second holder therein; and a horizontal position adjuster provided outside the processing vessel and connected to the first holder via a support supporting the first holder, the horizontal position adjuster being configured to adjust a horizontal position of the first holder.
Public/Granted literature
- US20220277979A1 BONDING APPARATUS, BONDING SYSTEM, AND BONDING METHOD Public/Granted day:2022-09-01
Information query
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